SEM--JSM 5800LV

Turning on the machine:

1. Turning the switch, like starting the car

2. Turn on chiller, to the top position

Sample preparation:

Clean the stage with IPA first

Use carbon tape (conductive, should look into how biological samples are made, sputtering with gold) , press the four corners

When using carbon tape: not too much, because the sample might be damaged when you remove it; not too little, because the sample might fall off the stage when tilted.

IMPORTANT: remember your sample position! Better to draw it on the paper

3. Check whether the SEM machine has warmed up or not, then turn on monitor

4. Put sample in, EVAC
the number （ the 7-segment display) will go down to zero

PREEVAC->HT READY  (at this stage you can run the current)

5. press HT

Current button ( 12 o'clock or 1 o'clock position) Max: 1 o'clock

6. Turn the left monitor on, initial magnitude: X3000

How to tilt the stage?

Command-> stage t50

50 is the angle, t means to tilt; r means to rotate. 

Adjust the focus:

WOBB, should be minimized (by adjusting the handle near the sample container, one is x position, one is y position)

ACCV (from MENU): increase the value, max: 15kV

Or using "stigmatism" 

when adjusting the focus, use small particles

Taking pics:

SL3---the highest quality (this would take up one disk)

ALBUM (on monitor) ---save

TV2--sampling on a higher speed, used the adjust the position of the sample

if the frozen pic has bad quality, or not conformal, reduce the voltage

Turning off the SEM:

1. recude current to 0

press HT

2. LSP1

3. increase Magnitude to max: x300,000

turn off left monitor

4. VENT

5. turn right monitor off

wait until you can take the sample out

put chamber in EVAC again, wait until it's HT READY, or pressure goes to 0

Then turn off SEM and chiller